I just looked in to this myself cause of a coolant smell on a 4runner I was thinking about purchasing (and got, and coolant smell is gone - must have been a spill). Still need to do it so I can track how significant my vc gasket leak is.
Anyway, from what I've gathered (and from doing it on other vehicles), don't do it on a hot engine. I've heard that stuff may be removed easier if it's warm, but with winter temps here I can't imagine spraying a 200+ degree engine with 40 degree water would be advised.
Plastic shopping bags over alternator, fuse box, battery, air box/MAF any other electronic related item that you've added. Lightly mist the engine bay from a distance to get everything wet. Spray engine degreaser everywhere and let it go to work (you can use the can stuff, some use simple green diluted, etc). Wait several minutes and rinse in the same manner you wet it down.
I've also used electric tooth brushes in the past as a follow up. You can get them extremely cheap and they do wonders for smaller/tighter spaces.
If your car starts immediately after, cool - get in and drive. If it refuses to start it's easiest to just wait and not panic.
Only difference I've read about on here that I never worried about in the past doing this to Subarus, is not focusing too hard on the spark plug area. You could probably put a little vaseline around there to prevent anything seeping in but that's why low pressure from a distance is recommended.
I've always used an old tshirt to blot up the chemically water residue should any remain, but if you're not going for show car look and just want to get to the bottom of something I don't think it's as important. You can follow up with whatever shiny stuff you want if it's safe for rubber. Let us know how it goes